微納尺度金屬導(dǎo)電材料熱疲勞研究進(jìn)展

微納尺度金屬導(dǎo)電材料熱疲勞研究進(jìn)展PROGRESS IN THERMAL FATIGUE OF MICRO/NANO-SCALE METAL CONDUCTORS

世界已逐漸進(jìn)入以物聯(lián)網(wǎng)和智能制造為主導(dǎo)的工業(yè)4.0時(shí)代，特別是人工智能和大數(shù)據(jù)處理的強(qiáng)烈需求，微納尺度器件的研發(fā)制造及廣泛使用的日趨活躍使得小尺度材料得到廣泛關(guān)注。由于這些材料的幾何尺度和微觀結(jié)構(gòu)尺度的約束效應(yīng)，其熱疲勞損傷行為與塊體材料不同。同時(shí)，材料尺度由微米向納米量級(jí)的轉(zhuǎn)變也會(huì)引起損傷機(jī)制的轉(zhuǎn)變，使材料表現(xiàn)出不同的損傷形式，產(chǎn)生顯著的尺寸效應(yīng)。本文綜述了近年來(lái)國(guó)內(nèi)外開(kāi)展的有關(guān)金屬薄膜/線的熱疲勞實(shí)驗(yàn)方法、熱疲勞損傷行為及演化和熱疲勞影響因素的研究進(jìn)展，探討了微納米尺度金屬材料熱疲勞的微觀機(jī)制和尺寸效應(yīng)，并對(duì)這一領(lǐng)域的研究前景進(jìn)行展望。

The world has gradually entered the industrial 4.0 Era, which is dominated by the Internet of things (IOT) and intelligent manufacturing. Especially, strong requirement for artificial intelligence and big data processing, the development and preparation of micro/nano electronic devices is becoming increasingly active, and much more concerns have been attracted to small-scale materials. Because of the constraint effect of geometric and microstructural dimensions of these materials, the thermal fatigue damage behavior is different from that of the bulk counterparts. At the same time, the change of the material scale from microns to nanometers also results in the transformation of the deformation mechanism, so that the materials exhibit different damage behaviors and significant size effects. In this paper, thermal fatigue testing methods, thermal fatigue damage and evolution, and the factors influencing thermal fatigue properties of metal film/line are reviewed, the corresponding mechanism of thermal fatigue and the size effect of the micro/nano-scale metals are discussed. The prospective research of this field in the future is addressed.

全文下載：https://pan.baidu.com/s/1jIcR5FS?

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